Handbook of Optical Dimensional Metrology
Edited by Kevin Harding
CRC Press – 2013 – 506 pages
Due to their speed, data density, and versatility, optical metrology tools play important roles in today’s high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods.
The book first builds a foundation for evaluating optical measurement methods. It explores the many terms of optical metrology and compares it to other forms of metrology, such as mechanical gaging, highlighting the limitations and errors associated with each mode of measurement at a general level. This comparison is particularly helpful to current industry users who operate the most widely applied mechanical tools.
The book then focuses on each application area of measurement, working down from large area to medium-sized to submicron measurements. It describes the measurement of large objects on the scale of buildings, the measurement of durable manufactured goods such as aircraft engines and appliances, and the measurement of fine features on the micron and nanometer scales. In each area, the book covers fast, coarse measures as well as the finest measurements possible. Best practices and practical examples for each technology aid readers in effectively using the methods.
Requiring no prior expertise in optical dimensional metrology, this handbook helps engineers and quality specialists understand the capabilities and limitations of optical metrology methods. It also shows them how to successfully apply optical metrology to a vast array of current engineering and scientific problems.
"This handbook is an impressive collection of methods to make very precise measurements of location, length and surface quality."
—Albert C. Claus, Optics & Photonics News, 2014
Optical Metrology: Introduction
Optical Metrology Overview, Kevin Harding
Machine Vision for Metrology, Kevin Harding and Gil Abramovich
Optical Metrology of Larger Objects
Laser Tracking Systems, Scott Sandwith and Stephen Kyle
Displacement Measuring Interferometry, Vivek G. Badami and Peter J. de Groot
Metrology of Large Parts, H. Philip Stahl
Optical Metrology of Medium-Size Objects
Portable Metrology, Daniel Brown and Jean Francois Laurie
Phase-Shifting Systems and Phase-Shifting Analysis, Qingying Hu
Moire Measurement, Toru Yoshizawa and Lianhua Jin
Optical Micro-Metrology of Small Objects
Automation in Interferometry, Erik Novak and Bryan Guenther
White-Light Interference 3D Microscopes, Joanna Schmit
Focus-Based Optical Metrology, Kevin Harding
Advanced Optical Micro-Metrology Methods
Parallel Multifunctional System for MEMS/MOEMS and Microoptics Testing, Małgorzata Kujawińska, Michał Józwik, and Adam Styk
Kevin Harding is a principal scientist at GE Research in Niskayuna, New York, where he leads work in optical metrology at the R&D center and provides guidance to a wide range of optical technology projects. Internationally recognized for his work in 3D measurement technology, he has received numerous honors, including the Automated Imaging Association Leadership Award and the SME Eli Whitney Productivity Award. A SPIE fellow, Harding has published over 120 technical papers, taught more than 60 short courses and tutorials, contributed sections to six books, and received over 55 patents.